NEWS 12 January 2019

Mikroniek: Wafer-handler systems engineering and magnetic bearing design

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and...

DSPE

A systems engineering approach to the design of a wafer handler is presented in this Mikroniek article, starting with an introduction to wafer handling, followed by the corresponding requirements and lastly common system architectures. Regarding wafer-handling robots, the conclusion is that the moving robot mass increases when contamination requirements become more stringent. Moreover, robotic concepts containing a linear stroke can improve stiffness and reduce mass at the cost of contamination-sealing complexity. To conclude, the design and realisation of a low-end, low-cost magnetic bearing for high-cleanliness robotic applications is discussed.


References

Undersigning cooperation euspen and DSPE

During the SYMPOSIUM ‘Post graduate education in precision engineering, today and tomorrow’ at the Precision Fair November 19, 2016. David Billington,Executive Director euspen (left) and Jan Willem Martens, Chairman Certification Program DSPE...

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Launch of the book The…

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CALL FOR ABSTRACTS DSPE conference…

Short abstracts of papers/demonstrations/posters (in English, max. one A4 page and preferably including illustrative pictures and photo’s) should be send to info@dspe-conference.nl.   The Program Committee of the Conference will...

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