NEWS 16 February 2021

Agile systems engineering approach towards high-throughput 3D metrology equipment for semiconductor process control

In the semiconductor industry, Moore’s law comes with increasing and complex demands and the need for advanced process control metrology. Nearfield Instruments fulfils these needs with their high-throughput scanning probe...

Julie van Stiphout - Sassen

In the semiconductor industry, Moore’s law comes with increasing and complex demands and the need for advanced process control metrology. Nearfield Instruments fulfils these needs with their high-throughput scanning probe metrology (HT-SPM) systems. January 2018, they started working on their first product, QUADRA. By rigorously adhering to an agile systems engineering methodology and promoting the concept of a minimum viable product, as described in this Mikroniek article, Nearfield Instruments was able to develop, integrate, test, and subsequently ship their first QUADRA to a major semiconductor fab in December 2020.


References

Persbericht Wim van der Hoek…

Eindhoven, november 2020 Wim van der Hoek (1924-2019) – Een constructief leven Kaleidoscopisch boek over grondlegger Nederlandse mechatronica-industrie Wim van der Hoek legde als werktuigbouwkundig ingenieur bij Philips en buitengewoon...

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Tasja van Rhee at ASML…

Tasja van Rhee, precision engineer at the department System Engineering of ASML received a bronze certificate of the Dutch Society for Precision Engineering from DSPE certification program chairman Jan-Willem Martens (right)....

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Mikroniek April: Thermal issues and…

The forthcoming Mikroniek issue, click here for a first impression, will appear on 1 July. It is in part dedicated to mechatronic system design & control, featuring a treatise on...

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