EVENT 7 February 2021

Lunch Lecture January hosted by VDL ETG

 By Hünkar Kemal Yurt, mechatronics system design engineer at VDL ETG VDL ETG is responsible to develop precise mechatronic handler systems for lithography machines which contain several 3 DOF SCARA...


About this event

 By Hünkar Kemal Yurt, mechatronics system design engineer at VDL ETG

VDL ETG is responsible to develop precise mechatronic handler systems for lithography machines which contain several 3 DOF SCARA type robots. These robots are mainly responsible for moving the payload between the modules with desired accuracy under high environmental vibration loads.

Hünkar will elaborate on how to calculate the position accuracy of the payload for different scenarios, using a validated Computer Aided Engineering (CAE) model for both frequency and time domain accuracy calculations.
When it comes to the performance of the robot, structural flexibility, driveline details, dissipation & friction and controller design are crucial details for the accuracy.

By using the Flexible Multi-Body Dynamic (FMBD) simulation approach which allows to perform efficient simulations in both frequency and time domains, a high- fidelity model is created for the robots by considering all crucial details.

The FMBD model is validated with respect to the measurement data on the physical prototype, and now it is being used for frequency and time domain accuracy calculations for special working scenarios by including the controller dynamic.

 


4 January 2021


The Netherlands

Digital


References

Wim van der Hoek Award…

During the online programme of the 2020 Precision Fair, the Wim van der Hoek Award was presented under the auspices of DSPE. The prize went to Teun van de Sande,...

Read more
Precision education at a high…

Joris Looman, Lead Design Engineer Opto-Mechanics at ASML, has obtained the Bronze ECP2 certificate for courses certified in the ECP2 programme, the European certified precision engineering course programme.   ECP2...

Read more
Launch book Natlab

Time: 18:00 – 21:00    The authors of the book Natlab, kraamkamer van ASML, NXP en de cd, Paul van Gerven en René Raaijmakers will organise a Natlab meeting on...

Read more

References

Eight Nominations for 2020 Wim…

Mechanical design based on the design principles defined by Wim van der Hoek is very much alive. The Philips engineer and part-time professorat Eindhoven University of Technology passed away early...

Read more
A total of nine nominees…

Technical talent, crucial for the future of the Dutch high-tech industry, is graduating at a high level at universities and universities of applied sciences in the Netherlands and Belgium. This...

Read more
Bronze ECP2 certificate for Jordy…

Jordy Nieuwhoff, optomechanical lead design engineer at ASML, has been awarded the Bronze certificate from the ECP2 programme, a European certified precision engineering course that is a collaboration between euspen...

Read more